<p>A MEMS device having a support frame positioned on a substrate surrounding a first electrode. A rigid flange portion at the top of the support frame is closely space from, and is connected to, a second electrode by relatively short spring members. RF conductors connected to respective first and second electrodes complete an RF switch. A dielectric layer on the first electrode forms a capacitive type device and includes an electrostatic shield layer on its surface. This electrostatic shield layer is connected to ground by a multi megohm bleeder resistance.</p>
申请公布号
WO2006007042(A2)
申请公布日期
2006.01.19
申请号
WO2005US15483
申请日期
2005.05.04
申请人
NORTHROP GRUMMAN CORPORATION;NATHANSON, HARVEY C.;KIRBY, CHRISTOPHER;TRANCHINI, ROBERT;YOUNG, ROBERT M.
发明人
NATHANSON, HARVEY C.;KIRBY, CHRISTOPHER;TRANCHINI, ROBERT;YOUNG, ROBERT M.