| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laminated type ceramic element that secures electric connection by a penetrating electrode in a through hole and also makes an internal electrode thin when manufactured. <P>SOLUTION: The laminated type piezoelectric element 1 becomes smaller in a shrinkage rate of the penetrating electrode in the through hole than that of the internal electrode 2 etc. in burning. Therefore, the shrinkage of the penetrating electrode in burning is suppressed, so that the difference becomes small in shrinkage rate between a green sheet that is a piezoelectric body layer 3 etc., and the penetrating electrode in the through hole in burning. Consequently, the electric connection by the penetrating electrode in the through hole is prevented from being broken. The shrinkage of the internal electrode 2 etc., in burning is larger than that of the penetrating electrode and the internal electrode 2 etc., is made thin through the burning. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
