| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve accuracy or sensitivity in detection by increasing the rate of change in capacity of an electrostatic capacity sensor. <P>SOLUTION: The electrostatic capacity sensor 10 comprises detection row wiring 34 connected to row wiring 14, detection column wiring 37 connected to column wiring 17, a first dielectric layer 15 coating the detection line wiring 34, and a second dielectric layer 16 coating the detection column wiring 37. The dielectric constant of the second dielectric layer 16 is set larger than that of the first dielectric layer 15. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
