MAGNETO-RESISTANCE EFFECT TYPE HEAD AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To increase a resistance changing rate of a spin valve film and to reduce a coercive force of a free layer by increasing a combination energy for an antiferromagnetic layer and a 1st ferromagnetic layer of a spin valve element and increasing an antiferromagnetic combination energy for the 1st ferromagnetic layer and a 2nd ferromagnetic layer through an Ru antiferromagnetic combination layer. SOLUTION: In the MnPt antiferromagnetic bottom type laminated ferric spin valve film which is laminated on a substrate with: an under layer; antiferromagnetic layer consisting of MnPt; 1st ferromagnetic layer consisting of CoFe; antiferromagnetic combination layer consisting of Ru; 2nd ferromagnetic layer consisting of CoFe; intermediate nonmagnetic layer consisting of Cu; free layer consisting of the laminated film of CoFe and NiFe; and protective layer, an Fe composition x of CoFex of the 1st ferromagnetic layer is set to 20 < x≤50 at%. COPYRIGHT: (C)2006,JPO&NCIPI