| 摘要 |
PROBLEM TO BE SOLVED: To provide a mass flow rate controller capable of miniaturizing the entire device and substantially reducing an occupancy area especially. SOLUTION: The mass flow rate controller for controlling a mass flow rate comprises: a casing body 42 extended in a vertical direction, whose inside is made hollow; a flow rate control valve 10 provided with a valve which can be seated to a valve port communicated with a fluid exit through a secondary side space; an actuator mechanism 26 for pressurizing the valve; a bypass flow path 12 arrayed in the vertical direction in parallel with the actuator mechanism; a fluid introducing path 74 for communicating an entrance head space and a fluid entrance; a sensor pipe 14 communicated between the entrance header space and an exit header space and provided so as to be extended upwards along the actuator mechanism and then bent downwards; a communicating path 48 for communicating the exit header space and the primary side space of the flow rate control valve; and a control circuit part 16 provided above the actuator mechanism so as to drive the actuator mechanism such that a detected mass flow rate matches with a set flow rate inputted from the outside. COPYRIGHT: (C)2006,JPO&NCIPI
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