发明名称 |
VAPORIZING TEMPERATURE SENSITIVE MATERIALS |
摘要 |
A method for vaporizing material onto a substrate surface to form a film includes providing a quantity of material into a vaporization apparatus, heating the material in the vaporization apparatus at a first temperature condition, and applying a heat pulse which acts on a portion of the material to cause such portion of the material to vaporize and be applied to the substrate surface. |
申请公布号 |
WO2006007280(A1) |
申请公布日期 |
2006.01.19 |
申请号 |
WO2005US19648 |
申请日期 |
2005.06.03 |
申请人 |
EASTMAN KODAK COMPANY;GRACE, JEREMY MATTHEW;LONG, MICHAEL;KOPPE, BRUCE EDWARD |
发明人 |
GRACE, JEREMY MATTHEW;LONG, MICHAEL;KOPPE, BRUCE EDWARD |
分类号 |
C23C14/12;C23C14/24;C23C14/26;H01L51/00;H01L51/40 |
主分类号 |
C23C14/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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