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发明名称
NEUARTIGE DÜNNSCHICHTEN FÜR DIE MIKROSYSTEMTECHNIK UND MIKROSTRUKTURIERUNG SOWIE IHRE VERWENDUNG
摘要
申请公布号
DE59712525(D1)
申请公布日期
2006.01.19
申请号
DE19975012525
申请日期
1997.08.22
申请人
CLONDIAG CHIP TECHNOLOGIES GMBH
发明人
ERMANTRAUT, EUGEN;KOEHLER, MICHAEL;SCHULZ, TORSTEN;WOHLFART, KLAUS;WOELFL, STEFAN
分类号
G01N31/20;B01J19/00;C12G1/00;C12M1/00;C12N15/09;C12Q1/00;G01N27/327;H01L21/312
主分类号
G01N31/20
代理机构
代理人
主权项
地址
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