发明名称 METHOD FOR SEALING OPTICAL FIBER CABLE AND PROJECTION EXPOSURE APPARATUS
摘要 <P>PROBLEM TO BE SOLVED: To prevent a metal bellows tube housing an optical fiber disposed in a vacuum environment from stretching or shrinking even when the pressure in the environment changes. <P>SOLUTION: The metal bellows tube housing an optical fiber has one or a plurality of wire members having higher rigidity than the optical fiber and having a length equivalent to that of the optical fiber, with the end face of the wire member fixed to the end face of a flange fabricated on the optical fiber and to the end face of the metal bellows. <P>COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006017994(A) 申请公布日期 2006.01.19
申请号 JP20040195509 申请日期 2004.07.01
申请人 CANON INC 发明人 YOSHIZAWA TOMOYA
分类号 G02B6/00;H01L21/027 主分类号 G02B6/00
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