DELIVERY HEAD DEVICE, DROPLET DELIVERY DEVICE, MANUFACTURING METHOD OF ELECTRO-OPTICAL DEVICE, ELECTRO-OPTICAL DEVICE, AND ELECTRONIC DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a delivery head device, a droplet delivery device, the manufacturing method of an electro-optical device, the electro-optical device and an electronic device that are capable of stably delivering a functional liquid and never extend functional liquid channels, respectively. SOLUTION: The delivery head device 13 is characterized in that a connection channel that is connected to a primary chamber 161 through a functional droplet delivery head 61 for delivering a functional liquid, a primary chamber 161 for introducing the functional liquid from a functional liquid tank 101 and a communication channel 163 and to a second chamber 162 for supplying the functional liquid from a discharge port 201 to the head 61 and a pressure control valve 141 having a pressure control section for opening/closing the channel 163 with the atmospheric air as a control reference pressure is formed and by providing the head 61 and a connection pipe block 301 connecting the port 201. COPYRIGHT: (C)2006,JPO&NCIPI