| 摘要 |
PROBLEM TO BE SOLVED: To provide a highly practical mechanism capable of properly correcting a positional shift, for the time-series positional shift between substrates occurring with time, in a vacuum sealing process of the substrate, which includes respective heat treatments of heating and cooling. SOLUTION: A control part 200 obtains control data for correcting positional shifts of X, Y,θone by one from a position correction control table 201 in accordance with work time of an assembling process as bonding of the substrates starts, motor driving signals MC(X), MC(Y), MC(θ) for positioning based on each of the control data are supplied to positioning motors 211-213 provided in a mechanically positioning mechanism 210, and a correcting process of the positional shift with time is executed in accordance with the profile (data) of the position correcting control table 201. COPYRIGHT: (C)2006,JPO&NCIPI
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