发明名称 |
Optical zoom system for a light scanning electron microscope |
摘要 |
For a confocal scanning electron microscope ( 1 ) an optical zoom system ( 41 ) with linear scanning is provided, which not only makes a zoom function possible, in that a variable magnification of an image is possible, but rather which additionally produces a pupil image in the illuminating beam path (IB) [BS] and thereby makes a variable imaging length possible (distance between the original pupil (En.P) [EP] and the imaged/reproduced pupil (Ex.P) [AP]) so that axially varying objective pupil positions can thereby be compensated.
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申请公布号 |
US2006011832(A1) |
申请公布日期 |
2006.01.19 |
申请号 |
US20040967318 |
申请日期 |
2004.10.19 |
申请人 |
WOLLESCHENSKY RALF;STEINERT JOERG;GOELLES MICHAEL;UHLENDORF KRISTINA |
发明人 |
WOLLESCHENSKY RALF;STEINERT JOERG;GOELLES MICHAEL;UHLENDORF KRISTINA |
分类号 |
G21K7/00;G02B15/173;G02B21/00 |
主分类号 |
G21K7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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