发明名称 Cold-cathode ionisation manometer having a longer service life due to two separate cathodes
摘要 A cold cathode ionization manometer for measuring pressure in vacuum and operating on the inverse magnetron principle. For extending the service life of the manometer it is provided with two independently operating cathodes and a common anode mounted in a measuring tube. The first cathode is mounted at the inlet of the measuing tube and its discharge serves as a gas purification device which prevents the formation of contaminating layers by cracking and polymerizing hydrocarbons and other substances entering the measuring tube thereby protecting the second cathode and extending the overall service life of the manometer.
申请公布号 US2006012373(A1) 申请公布日期 2006.01.19
申请号 US20050528600 申请日期 2005.03.21
申请人 OTTO-VONGUERICKE-UNIVERSITAET MAGDEBURG 发明人 EDELMANN CHRISTIAN;WILFERT STEFAN
分类号 G01L21/30;G01L21/34;H01J41/06 主分类号 G01L21/30
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