发明名称 HYBRID BALL-LOCK ATTACHMENT APPARATUS
摘要 The present invention uses hybrid ball- lock devices as an alternate for threaded fasteners. Parts of the fastener exposed directly to the plasma act as a shield for the remaining pieces of the fastener or are used as a material to actually enhance plasma characteristics. The present invention also provides consistent electrical and mechanical contact between parts, without the use of any tools.
申请公布号 KR20060006814(A) 申请公布日期 2006.01.19
申请号 KR20057019759 申请日期 2004.03.31
申请人 TOKYO ELECTRON LIMITED 发明人 FINK STEVEN T.
分类号 H01L21/3065;C23C16/00;H01J37/32 主分类号 H01L21/3065
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