发明名称 DROPLET DISCHARGE DEVICE, AND MANUFACTURING METHOD FOR ELECTRO-OPTICAL DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a droplet discharge device capable of surely preventing the generation of clogging in nozzles for discharging a solvent type liquid material, and a manufacturing method for an electro-optical device using this droplet discharge device. SOLUTION: In the droplet discharge device 10, when a cap member 761 for preventing drying is attached to a droplet discharge head 22, steam of an organic solvent M' is supplied from a solvent tank 88 to the inside of a sealed space 87 constituted between a nozzle forming surface of the droplet discharge head 22 and the cap member 761 for preventing drying. As a result, the drying of the liquid material in the nozzle 27 is prevented, thereby preventing the clogging of the nozzle 27. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006015302(A) 申请公布日期 2006.01.19
申请号 JP20040198030 申请日期 2004.07.05
申请人 SEIKO EPSON CORP 发明人 YANAGIHARA HIROKAZU
分类号 B05C5/00;H01L51/50;H05B33/10 主分类号 B05C5/00
代理机构 代理人
主权项
地址