发明名称 |
Projection objective having a high aperture and a planar end surface |
摘要 |
A projection objective for imaging a pattern provided in an object plane of the projection objective onto an image plane of the projection objective suitable for microlithography projection exposure machines has a plurality of optical elements transparent for radiation at an operating wavelength of the projection objective. At least one optical element is a high-index optical element made from a high-index material with a refractive index n>=1.6 at the operating wavelength.
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申请公布号 |
US2006012885(A1) |
申请公布日期 |
2006.01.19 |
申请号 |
US20050151465 |
申请日期 |
2005.06.14 |
申请人 |
CARL ZEISS SMT AG |
发明人 |
BEDER SUSANNE;SINGER WOLFGANG;SCHUSTER KARL-HEINZ |
分类号 |
G02B3/00 |
主分类号 |
G02B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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