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发明名称
Verfahren zur Verringerung der Einfluss des Substrats auf einem Resist
摘要
申请公布号
DE69832751(D1)
申请公布日期
2006.01.19
申请号
DE1998632751
申请日期
1998.04.23
申请人
WAKO PURE CHEMICAL INDUSTRIES, LTD.
发明人
FUJIE, HIROTOSHI;SOUKI, TOHRU;UEHARA, YUKIKO
分类号
G03F7/004;G03F7/038;G03F7/039
主分类号
G03F7/004
代理机构
代理人
主权项
地址
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