| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface defect inspection device provided with an illumination means capable of making only a crack-like defect of an intrinsic major defect appear as a shadow, while precluding a gentle unevenness on an inspection objective surface, a light and fine scratch, chipping and a rough face generated on a midway of a process, or a micro shallow flaw not defined as a defect such as a pit from appearing as the shadow. SOLUTION: In this surface defect inspection method and surface defect inspection device, the inspection objective surface is illuminated by the uniform diffusion light illumination means having a wide incident angle onto the inspection objective surface, to be imaged by a telecentric optical system of imaging means, the gentle unevenness and the micro flaw not defined as the defect are thereby not recognized erroneously as the defect, since those are precluded from appearing as the shadows, and reliability for the defect inspection is enhanced as an effect thereof. COPYRIGHT: (C)2006,JPO&NCIPI
|
