发明名称 Methods for electrochemically fabricating structures using adhered masks, incorporating dielectric sheets, and/or seed layers that are partially removed via planarization
摘要 Embodiments of the present invention provide mesoscale or microscale three-dimensional structures (e.g. components, device, and the like). Embodiments relate to one or more of (1) the formation of such structures which incorporate sheets of dielectric material and/or wherein seed layer material used to allow electrodeposition over dielectric material is removed via planarization operations; (2) the formation of such structures wherein masks used for at least some selective patterning operations are obtained through transfer plating of masking material to a surface of a substrate or previously formed layer, and/or (3) the formation of such structures wherein masks used for forming at least portions of some layers are patterned on the build surface directly from data representing the mask configuration, e.g. in some embodiments mask patterning is achieved by selectively dispensing material via a computer controlled inkjet nozzle or array or via a computer controlled extrusion device.
申请公布号 US2006011486(A1) 申请公布日期 2006.01.19
申请号 US20050139262 申请日期 2005.05.26
申请人 MICROFABRICA INC. 发明人 LOCKARD MICHAEL S.;SMALLEY DENNIS R.;LARSEN WILLA M.;CHEN RICHARD T.
分类号 B05D1/32;C25D5/02 主分类号 B05D1/32
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