发明名称 |
Method of detecting one or more defects in a string of spaced apart studs |
摘要 |
A landing pad for use as a contact to a conductive spacer adjacent a structure in a semiconductor device comprises two islands, each of which is substantially rectangularly shaped and is spaced apart from one another and from the structure. Conductive spacers are adjacent to each island and overlapping each other and overlapping with the conductive spacer adjacent to the structure. The contact to the landing pad is on the conductive spacers adjacent to the islands and spaced apart from the structure.
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申请公布号 |
US2006014339(A1) |
申请公布日期 |
2006.01.19 |
申请号 |
US20050221161 |
申请日期 |
2005.09.06 |
申请人 |
LEE DANA;LU WEN-JUEI;TSUI FELIX Y |
发明人 |
LEE DANA;LU WEN-JUEI;TSUI FELIX Y. |
分类号 |
H01L21/8238;H01L21/336;H01L21/768;H01L29/76 |
主分类号 |
H01L21/8238 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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