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发明名称
HALBLEITER-POSITIONSSENSOR
摘要
申请公布号
DE69832820(D1)
申请公布日期
2006.01.19
申请号
DE19986032820
申请日期
1998.10.13
申请人
HAMAMATSU PHOTONICS K.K., HAMAMATSU
发明人
TAKESHITA, TATSUO;SAKAKIBARA, MASAYUKI
分类号
F16K31/20;G01B11/14;G01C3/06;G01C3/08;G01D5/26;G01S3/781;G01S3/783;H01L31/02;H01L31/16
主分类号
F16K31/20
代理机构
代理人
主权项
地址
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