发明名称 |
Composition for stripping and cleaning and use thereof |
摘要 |
A composition comprising one or more water soluble organic solvents comprising a glycol ether; water; a fluoride containing compound provided that if the fluoride containing compound is ammonium fluoride than no additional fluoride containing compound is added to the composition; optionally a quaternary ammonium compound; and optionally a corrosion inhibitor is disclosed herein that is capable of removing residues from an article such as photoresist and/or etching residue. Also disclosed herein is a method for removing residues from an article using the composition disclosed herein.
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申请公布号 |
US2006014656(A1) |
申请公布日期 |
2006.01.19 |
申请号 |
US20050155654 |
申请日期 |
2005.06.20 |
申请人 |
EGBE MATTHEW I;LEGENZA MICHAEL W;WIEDER THOMAS M;RIEKER JENNIFER M |
发明人 |
EGBE MATTHEW I.;LEGENZA MICHAEL W.;WIEDER THOMAS M.;RIEKER JENNIFER M. |
分类号 |
C11D7/32 |
主分类号 |
C11D7/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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