发明名称 MICROSCOPE OBSERVATION METHOD, MICROSCOPE DEVICE, AND IMAGE PROCESSING DEVICE
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a microscope observation method capable of providing an interference image without generating actual interference and also provide a microscope device, and an image processing device. <P>SOLUTION: The microscope observation method employs the microscope device that has an imaging optical system for imaging an inspected light flux ejected from an irradiated specimen and can measure a complex amplitude distribution of inspected light wave generated on an imaging surface of the imaging optical system. The microscope observation method comprises an inspected data acquisition procedure (S2) of acquiring data of the complex amplitude distribution of the inspected light wave, a reference data acquisition procedure (S1) of acquiring data of the complex amplitude distribution of reference light wave generated on the imaging surface when the specimen is removed from an optical path, and image creating procedures (S3, S4) of superimposing the data of the complex amplitude distribution of the inspected light wave on the data of the complex amplitude distribution of the reference light wave between the same coordinates, taking absolute value square of them, and creating image data of the interference figure of the specimen. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p>
申请公布号 JP2006017494(A) 申请公布日期 2006.01.19
申请号 JP20040193380 申请日期 2004.06.30
申请人 NIKON CORP 发明人 OKI YASUSHI
分类号 G01N21/27;G01N21/35;G01N21/3563;G01N21/3586;G02B21/00;G02B21/36 主分类号 G01N21/27
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