SYSTEM AND METHOD FOR GENERATING AND CONTROLLING MULTIPLE INDEPENDENTLY DEFLECTABLE LASER BEAM FOR MATERIAL PROCESSING

摘要

PROBLEM TO BE SOLVED: To provide a laser process system for performing processing to a workpiece using multiple independently deflectable laser beamlets.

SOLUTION: The laser process system includes: a laser and beam shaper 106 for generating a shaped source beam 112; a splitter stage 114 for generating a plurality of beamlets 116 from the shaped source beam; a beamlet controller 128 including an independently deflectable beamlet steering mirror for and corresponding to each beamlet for independently directing the corresponding beamlet, and a mirror controller for controlling each beamlet deflecting mirror; and an optical path including a scanning lens 136 for directing each deflectable beamlet to a target area of a workpiece. Each beamlet deflecting mirror is a multi-axis micro-electro-mechanical mirror and the system further includes a beam dump 148 located in the optical path for intercepting a beamlet deflected into the beam dump by the corresponding beamlet deflecting mirror.

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