| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a vacuum pressure control system capable of early detecting abnormalities of the system such as abnormalities of a vacuum pressure sensor, leaks from a reactor, and clogging of pipes. <P>SOLUTION: When the degree of opening of a valve 16 opening/closing in proportion to vacuum, which is acquired through a potentiometer 18 reaches a preliminarily fixed set value X1 (S22:Yes), the occurrence of an abnormality of system, like an abnormality of the vacuum pressure sensor, a leakage from the reactor, or clogging of pipes is determined to perform abnormality processing (S25) when a vacuum pressure of a reaction chamber 10 acquired through pressure sensors 14 and 15 is higher than a preliminarily fixed set value X2 (S24:NO). Set values X1 and X2 are obtained in advance by experiments or the like so that abnormalities of the system such as abnormalities of the vacuum pressure sensor, leaks from the reactor, and clogging of pipes can be properly detected. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
