| 摘要 |
A multilayer polarization sensor (MPS) for measuring the polarization of radiation in the x-ray and extreme UV wavelength regions. The MPS includes a silicon photodiode with a multilayer (e.g. 50 bilayers) interference coating. The interference coating selectively transmits the orthogonal (p) polarization component in the desired wavelength to generate a current. The (s) polarization component is transmitted through a second interference coating to generate another current. The ratio of the difference between the currents to sum of the currents is the measure of polarization of the incident radiation. Radiation outside the desired wavelength can be dispersed out of the incident beam by a transmission or reflection grating.
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