GAS BEARING SUBSTRATE-LOADING MECHANISM PROCESS

摘要

A levitation apparatus for use under vacuum or near vacuum conditions comprises a levitation plate (3) with a plurality of injection points (1) and adjacent suction points (2) for gas, creating an air bearing (4) and thereby supporting a thin plate-like substrate (5). Further embodiments comprise a transport mechanism for supported substrates and/or a tilting mechanism to incline the levitation plate.