| 摘要 |
<P>PROBLEM TO BE SOLVED: To correct pattern positioning error as desired without modifying the disposition of a light modulation unit. <P>SOLUTION: Each of a series of divided pattern data is generated to overlap part of adjacent scan data, independently converted into raster data, and outputted as drawing data. In order to correct the position deviation of a pattern drawing caused by positioning error by exposure heads 12A to 12H, a read out address region is shifted by ΔS, and raster data are read out from a bit map memory. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
