发明名称 LIGHT INTENSITY DISTRIBUTION ADJUSTMENT FILTER AND ITS MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a light intensity adjustment filter capable of accurately adjusting the light intensity distribution of a light source to a desired one. SOLUTION: One example of the light intensity distribution adjustment filter according to the invention includes: a first transparent plate 11 that is concave on one side and flat on the other side; a second transparent plate 14 on which a metal layer 13 is formed and one side of which has a convex face complementary to the concave face and the other side of which is flat; and an adhesive layer 12 for bonding the concave and convex faces together. In addition, where the thickness of the metal layer 13 in the direction in which light travels is z and a light absorption rate isα, the ratio of the luminance of light transmitted through the metal layer 13 to the luminance of incident light is ä1-z×log<SB>10</SB>(1/(1-α))}. The light intensity distribution of an axisymmetric Gaussian distribution can be flatten by making the concave and convex faces spherical. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006017838(A) 申请公布日期 2006.01.19
申请号 JP20040193253 申请日期 2004.06.30
申请人 NIKON CORP 发明人 KOBAYASHI MISAKO;MORI YOSHIO
分类号 G02B5/00 主分类号 G02B5/00
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