| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for creating an optimum defect inspection recipe capable of detecting all defect species independent of the degree of a creators's skill. SOLUTION: A provisional inspection recipe is created through the use of a simulated defective wafer 1 provided with simulated defect patterns DF1-DF3 having changes in a height direction and changes in a planar shape to a simulated normal pattern. Defect inspection is performed on the simulated defective wafer 1. Detected defect data is collated with previously acquired simulated defect data of the simulated defective wafer 1 to quantify defect detection sensitivity. A recipe parameter is changed until a desired defect detection rate is acquired to create a provisional inspection recipe. COPYRIGHT: (C)2006,JPO&NCIPI
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