| 摘要 |
PROBLEM TO BE SOLVED: To provide a time savable alternative method for taking out a microscopic sample from a substrate. SOLUTION: The method for taking out the microscopic sample 1 from the substrate 2 comprises a step of performing a cutting process where the substrate 2 is irradiated with a beam 4 so as to cut out the sample 1 from the substrate 2, and a step of performing an adhering process where the sample 1 is adhered to a probe 3. In at least a partial period of the duration of the cutting process, the cutting process is simultaneously by at least two beams 4 and 5. The cutting by at least two beams allows extraction of the sample 1 without changing the azimuth of the substrate 2 related to a beam generating means. The possibility of simultaneously operating two beams and keeping constant azimuth provides time saving comparing with a method of performing the cutting with a single beam. COPYRIGHT: (C)2006,JPO&NCIPI
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