| 摘要 |
PROBLEM TO BE SOLVED: To provide a lighting system for inspecting a micropattern of a printed circuit board, to provide an automatic optical inspection system equipped with the same, and to provide its inspection method. SOLUTION: The lighting system with which the automatic optical inspection system is equipped, comprises; at least one first light source which outputs reflection light centered on a flat surface section in a printed circuit board pattern; a beam splitter which receives/outputs the reflection light from the first light source to the printed circuit board and receives/outputs light reflected from the printed circuit board to an image sensor; at least one second light source which outputs reflection light centered on an edge section of the printed circuit board pattern; and a condenser lens which receives, condenses and outputs the reflection light from the second light source. When an image of the micropattern in the printed circuit board is acquired, levels of brightness and uniformity of the light are made high. COPYRIGHT: (C)2006,JPO&NCIPI
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