| 摘要 |
PROBLEM TO BE SOLVED: To provide a temperature control device controlling pump temperature of a turbo molecular pump to cope with various gas load conditions. SOLUTION: A temperature setting part 8 determines whether temperature of a rotor of the turbo molecular pump is a predetermined value or higher based on current accumulation value from a motor control part 5, lower target temperature Tt with setting a predetermined lower limit value as a lower limit when temperature of the rotor of the turbo molecular pump is the predetermined value or higher, and raises target temperature Tt with setting a predetermined upper limit value as a upper limit when temperature of the rotor of the turbo molecular pump is lower than the predetermined. The target temperature Tt is input to a temperature control part 7, the temperature control part 7 controls a heater 29 and a cooling device 30 based on the target temperature Tt and detection value of a temperature sensor 31 and performs temperature control to keep pump temperature at the target temperature Tt. COPYRIGHT: (C)2006,JPO&NCIPI
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