| 摘要 |
PROBLEM TO BE SOLVED: To provide a wafer transport system that can decrease electric power consumption and eliminate nano-sized particles, and a method for adjusting pressure in the system. SOLUTION: A wafer transport system 40 includes a load port 100 for housing a wafer container 20, a housing 200 connected with the load port 100, a wafer transport 280 for transporting a wafer between the wafer container 20 and the housing 200, a wafer container sensor 330 for sense the presence of the wafer container 20 on the load port 100, a variable-speed fan 322 located in the first part of the housing 200, a variable exhaust unit 340 located in the second part facing the first part in the housing 200 which can change the evacuation rate of air evacuated from the housing 200, and a controller 360 that can operate the variable-speed fan 322 and the variable exhaust unit 340 in a variety manner, based on signals received from the wafer container sensor 330. COPYRIGHT: (C)2006,JPO&NCIPI
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