发明名称 |
Method for forming thin film and apparatus therefor |
摘要 |
A plurality of antenna elements, each of which has first and second linear conductors whose first ends are electrically interconnected are formed. The antenna elements are arranged in plane in such a way that the first and second linear conductors are alternated and separated from one another at regular intervals, thereby forming one or more array antennas which are disposed in a chamber. The second ends of the first linear conductors are connected to a high-frequency power supply, and the second ends of the second linear conductors are connected to ground. A plurality of substrates are parallel placed on both sides of the array antennas at distances approximate to the distances between the linear conductors. A film is formed by introducing an ingredient gas into the chamber.
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申请公布号 |
US2006011231(A1) |
申请公布日期 |
2006.01.19 |
申请号 |
US20050529904 |
申请日期 |
2005.04.01 |
申请人 |
UEDA MASASHI;TAKAGI TOMOKO;ITO NORIKAZU |
发明人 |
UEDA MASASHI;TAKAGI TOMOKO;ITO NORIKAZU |
分类号 |
C23C16/509;H01L31/00;H01L31/04;H01L31/18 |
主分类号 |
C23C16/509 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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