发明名称 SUPPORTING STAND
摘要 <P>PROBLEM TO BE SOLVED: To provide a supporting stand for supporting an optical axis path between a light source of an exposure device and a main device for resolving various problems in a conventional technique. <P>SOLUTION: The supporting stand comprises one or more H-shaped steel supporting the optical axis path between the main device and an accessory device of the exposure device, a supporting element provided to a first position of the H-shaped steel, a signal emitter provided to a second position of the H-shaped steel and a signal receiver provided to a third position of the H-shaped steel. <P>COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006019611(A) 申请公布日期 2006.01.19
申请号 JP20040197790 申请日期 2004.07.05
申请人 POWERCHIP SEMICONDUCTOR CORP 发明人 WANG HUNG-CHI;CHEN MOU-SIRN;KUO CHUNG-MING
分类号 H01L21/027;G03F7/20 主分类号 H01L21/027
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