发明名称 |
Columnar structured material and method of manufacturing the same |
摘要 |
A method of forming, on a substrate, minute-sized columnar portions of a columnar structured material at minute intervals, and a columnar structured material formed by the manufacturing method. A columnar structured material is formed through an etching process in which a pattern of minute dots formed on the substrate is utilized as a mask. The pattern of the minute dots is obtained by introducing a mask material into columnar microholes of a porous film formed on the substrate and then removing the porous film. The porous film is formed by removing columnar substances from a structured material in which the columnar substances which are so formed as to contain a first component are dispersed in a matrix which is made of another component and is so formed as to contain a second component that can form a eutectic together with the first component.
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申请公布号 |
US2006012013(A1) |
申请公布日期 |
2006.01.19 |
申请号 |
US20050535452 |
申请日期 |
2005.05.19 |
申请人 |
CANN KABUSHIKI KAISHA |
发明人 |
OGAWA MIKI;MIYATA HIROKATSU;OTTO ALBRECHT;KURIYAMA AKIRA;OKURA HIROSHI;DEN TOHRU;FUKUTANI KAZUHIKO |
分类号 |
B82B1/00;H01L29/40;C23C14/16;C23C14/58;H01L21/033;H01L21/308;H01L21/3205;H01L29/06 |
主分类号 |
B82B1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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