发明名称 Columnar structured material and method of manufacturing the same
摘要 A method of forming, on a substrate, minute-sized columnar portions of a columnar structured material at minute intervals, and a columnar structured material formed by the manufacturing method. A columnar structured material is formed through an etching process in which a pattern of minute dots formed on the substrate is utilized as a mask. The pattern of the minute dots is obtained by introducing a mask material into columnar microholes of a porous film formed on the substrate and then removing the porous film. The porous film is formed by removing columnar substances from a structured material in which the columnar substances which are so formed as to contain a first component are dispersed in a matrix which is made of another component and is so formed as to contain a second component that can form a eutectic together with the first component.
申请公布号 US2006012013(A1) 申请公布日期 2006.01.19
申请号 US20050535452 申请日期 2005.05.19
申请人 CANN KABUSHIKI KAISHA 发明人 OGAWA MIKI;MIYATA HIROKATSU;OTTO ALBRECHT;KURIYAMA AKIRA;OKURA HIROSHI;DEN TOHRU;FUKUTANI KAZUHIKO
分类号 B82B1/00;H01L29/40;C23C14/16;C23C14/58;H01L21/033;H01L21/308;H01L21/3205;H01L29/06 主分类号 B82B1/00
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