| 摘要 |
<P>PROBLEM TO BE SOLVED: To create an image of which appearance is in an unified state and to perform the inspection with stable accuracy whichever relation the varying direction of gradient of an inspected object takes with respect to the arrangement of a light source. <P>SOLUTION: The scan of a line sensor 10 is repeated while a substrate 5 is moved in one direction with respect to an optical system where a light projecting section 2 including a plurality of linear light sources is arranged in the direction along an image pick-up region of the line sensor 10, and a two-dimensional image of the substrate 5 is created. After the completion of the first image pick-up processing, the substrate 5 is returned to an initial position, and rotated by 90°, and second image pick-up processing is performed. An image of the same component is cut from the image obtained by two instances of image pick-up processing, and an image for inspection is created by these additions of averaging processing. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
