FLAT SUBSTRATE CONVEYANCE METHOD AND ITS DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a flat substrate conveyance method and its device for eliminating cause of scratch easily by making a roller mounting position of a conveyance roller and diameter of a roller attached to the conveyance roller differ per process and specifying a process from a position of scratch caused on a substrate. SOLUTION: When conveying the flat substrate 4 for a flat display panel by the conveyance roller 1, a conveyance path of the flat substrate 4 is divided into a plurality of virtual blocks, and the conveyance roller 1 to which the roller 3 having position and/or diameter D different per conveyance path of the divided virtual blocks is attached is arranged. The conveyance roller 1 to which the rollers 3 having the same diameter D at the same positions are attached is arranged in a conveyance path in the same virtual block. Scratch F of a conveyance roller contact face of the substrate 4 is inspected after conveying the flat substrate, and a conveyance path of the virtual block in which the conveyance roller 1 causing the scratch F is arranged is specified from a position of the scratch F or an intervalπ×D of the scratch F. COPYRIGHT: (C)2006,JPO&NCIPI