DEVICE EVALUATION ELEMENT, TEG, SEMICONDUCTOR WAFER, SEMICONDUCTOR DEVICE EVALUATION METHOD, AND SEMICONDUCTOR DEVICE FABRICATION PROCESS

摘要

PROBLEM TO BE SOLVED: To provide a device evaluation element realizing process evaluation in the way of fabrication process in a short time even in case of a micro semiconductor device.

SOLUTION: The device evaluation element is provided with an alignment mark for performing alignment by means of an electron beam or light, and a semiconductor device evaluation element having an electron beam receiving region is arranged at a position separated by a predetermined distance from the alignment mark.

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