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发明名称
Verfahren zur Herstellung eines Halbleitersensors für eine dynamische Grösse
摘要
申请公布号
DE69927118(T2)
申请公布日期
2006.01.19
申请号
DE19996027118T
申请日期
1999.12.09
申请人
FUJI ELECTRIC CO., LTD.
发明人
UEYANAGI, KATSUMICHI;SASAKI, MITSUO;NISHIKAWA, MUTSUO;TAKAGI, SHIHO
分类号
G01L9/04;G01L9/00;G01P15/08;G01P15/12;H01L29/84
主分类号
G01L9/04
代理机构
代理人
主权项
地址
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