| 摘要 |
PROBLEM TO BE SOLVED: To manufacture an aluminum nitride powder for preparing an aluminum nitride powder having specified particle diameters and a specified oxygen content, which is useful for manufacturing an aluminum nitride sintered compact realizing both of high thermal conductivity and low sintering shrinkage. SOLUTION: The method for manufacturing the aluminum nitride powder comprises dispersing/mixing an aluminum powder having an average diameter of≤40μm and containing oxygen in an amount of≤0.5 mass % in nitrogen gas in a ratio of≤100 g per 1 Nm<SP>3</SP>nitrogen gas, then atomizing the resulting mixture into a reaction tube, nitriding, and capturing the product by a capturing system. In the method, the oxygen concentrations in the parts of the reaction tube and the capturing system, where the temperature becomes≥100°C, are controlled to be≤10 ppm, and taking-out of the product is performed at a temperature of≤100°C. COPYRIGHT: (C)2006,JPO&NCIPI
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