Plasma treatment apparatus and light detection method of a plasma treatment

摘要

The subject of the invention is a plasma treatment apparatus and light detection method capable of detecting multiple optical signals obtained from multiple measurement locations and capable of analyzing condition of each of the measurement locations using an apparatus having the advantage of having a more simplified structure. Interference light L 1 passes through optical fiber 222 and is transmitted to spectroscopic component 230. Plasma light L 2 passes through optical fiber 224 and is transmitted to spectroscopic component 230. These lights separately undergo respective spectroscopic separation. Interference light spectrum L 1 g obtained by spectroscopic separation of interference light L 1 passes through first light path 226 and strikes an interference light photoreception region of photoelectric conversion component 240. Plasma light spectrum L 2 g obtained by spectroscopic separation of plasma light L 2 passes through second light path 228 and strikes a plasma light photoreception region of photoelectric conversion component 240.