发明名称 Ellipsometer, measurement device and method, and lithographic apparatus and method
摘要 An ellipsometer includes an optical component and a detector. The optical component has two birefringent parts in optical communication via a border surface. Light incident on the border surface is split into two reflected and two transmitted components. The detector is configured to measure a property of at least three out of the four components. Based on the measured properties, a state of polarization of the incident light may be determined.
申请公布号 US2006012788(A1) 申请公布日期 2006.01.19
申请号 US20040893542 申请日期 2004.07.19
申请人 ASML NETHERLANDS B.V. 发明人 PRESURA CRISTIAN
分类号 G01J4/00;G01B11/00 主分类号 G01J4/00
代理机构 代理人
主权项
地址