发明名称 |
INSPECTION DEVICE FOR TRANSPARENT SUBSTRATE END SURFACE AND INSPECTION METHOD THEREFOR |
摘要 |
<p>An inspection apparatus for inspecting an end face of a transparent substrate and an inspection method for inspecting an end face of a transparent substrate according to the present invention are capable of reliably and accurately detecting defects at the end face of the transparent substrate. When a display panel substrate 10 which is a transparent substrate is placed on a rotating table 21, a light is intermittently emitted from an end-face illuminating unit 39 arranged opposite to the end face of the display panel substrate 10. The light emitted along the surface of the substrate 10 is reflected from a lower reflecting mirror 42 toward the end face of the transparent substrate 10. The end face and an adjacent portion thereof are imaged by a CCD camera 36. Defects at the end face of the display panel substrate 10 are detected based on an image density of each pixel in the obtained image data.</p> |
申请公布号 |
EP1617209(A1) |
申请公布日期 |
2006.01.18 |
申请号 |
EP20040716705 |
申请日期 |
2004.03.03 |
申请人 |
MITSUBOSHI DIAMOND INDUSTRIAL CO., LTD. |
发明人 |
MATSUMOTO, J. |
分类号 |
G01N21/95;G01N21/958;G02F1/13;(IPC1-7):G01N21/958 |
主分类号 |
G01N21/95 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|