<p>A semiconductor manufacturing apparatus includes a wafer guide, and a wafer detecting system to determine whether a wafer is properly seated on a hot plate, by detecting temperature variations for the hot plate when the wafer is positioned onto the hot plate.</p>
申请公布号
KR20060005546(A)
申请公布日期
2006.01.18
申请号
KR20040054386
申请日期
2004.07.13
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
PARK, CHAN HOON;LEE, JONG HAW;KIM, SANG SIK;PARK, KWANG YOUNG;LEE, KWANG HO;CHYUN, KI HYUN