发明名称 |
Micro-electromechanical actuators |
摘要 |
The present invention relates to a micro-electromechanical actuator. An electromagnetic-type micro-electromechanical actuator of the present invention has a conductive beam formed in a micro electronic substrate on an upper side of a magnetic substance, so that the conductive beam can be moved toward an in-plane mode in parallel to the micro electronic substrate depending on a direction that current flows. Therefore, the micro-electromechanical actuator can be applied to most of electromagnetic micro-electromechanical systems that require an in-plane mode.
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申请公布号 |
US6987435(B2) |
申请公布日期 |
2006.01.17 |
申请号 |
US20020185654 |
申请日期 |
2002.06.27 |
申请人 |
ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE |
发明人 |
KO JONG SOO;LEE DAE SIK;LEE MYUNG LAE;JUN CHI HOON;KIM YOUN TAE |
分类号 |
H01H51/22;H02K33/10;B81B3/00;G02B6/26;G02B6/35;H01H1/00;H01H53/06 |
主分类号 |
H01H51/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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