发明名称 Piezoelectric transducers
摘要 A system and method of operation for a piezoelectric transducer is described which utilizes a mesa structure interposed between a piezoelectric material element and a chamber diaphragm. The system can be used as a sensor where a net motion to the diaphragm causes a net charge equal to the sum of the charges on each piezoelectric diaphragm. Alternatively, the system can be used as an actuator wherein an applied voltage causes movement of the piezoelectric transducer and the chamber diaphragm.
申请公布号 US6987348(B2) 申请公布日期 2006.01.17
申请号 US20030664472 申请日期 2003.09.16
申请人 PALO ALTO RESEARCH CENTER INC. 发明人 BUHLER STEVEN A.;LITTAU KARL A.;FITCH JOHN S.;ANDREWS JOHN R.;BURKE CATHIE J.;NYSTROM PETER J.;SCHMACHTENBERG, III RICHARD
分类号 B41J2/14;B41J2/16;H01L41/09;H01L41/22 主分类号 B41J2/14
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