发明名称 Capped microsensor
摘要 A capped microsensor is described. It is suggested that a current conductor, positioned in the cavity and having at least two voltage taps, be provided, this configuration being used for seal testing, e.g., during quality control, by detecting at least one thermodynamic variable of a gaseous medium present inside the cavity via this configuration.
申请公布号 US6986278(B2) 申请公布日期 2006.01.17
申请号 US20040838734 申请日期 2004.05.03
申请人 ROBERT BOSCH GMBH 发明人 SCHATZ FRANK;RAUDZIS CARSTEN;REIMANN MATHIAS
分类号 G01M3/00;H01L23/02;B81B7/00;G01M3/34 主分类号 G01M3/00
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