INTEGRATED SPECTROSCOPIC MICROBOLOMETER WITH MICROFILTER ARRAYS

摘要

A method for forming an integrated circuit includes providing an array of detectors proximate an outer surface of a first substrate layer. The array of detectors operate to detect the presence or absence of one or more wavelengths within a spectrum of transmitted energy. One or more filters are provided proximate a second substrate layer. The one or more filters operate to affect the spectrum of transmitted energy through the one or more filters. The second substrate layer is proximate to the outer surface of the first substrate layer to enclose the array of detectors in a vacuum environment.