发明名称 SEMICONDUCTOR FABRICATION PROCESS WITH ASYMMETRICAL CONDUCTIVE SPACERS
摘要 A semiconductor process and resulting transistor includes forming conductive extension spacers (146, 150) on either side of a gate electrode (116). Conductive extensions (146, 150) and gate electrode 116 are independently doped such that each of the structures may be n-type or p-type. Source/drain regions (156) are implanted laterally disposed on either side of the spacers (146, 150). Spacers (146, 150) may be independently doped by using a first angled implant (132) to dope first extension spacer (146) and a second angled implant (140) to dope second spacer (150). In one embodiment, the use of differently doped extension spacers (146, 150) eliminates the need for threshold adjustment channel implants.
申请公布号 KR20060004969(A) 申请公布日期 2006.01.16
申请号 KR20057020594 申请日期 2005.10.28
申请人 FREESCALE SEMICONDUCTOR, INC. 发明人 MATHEW LEO;RAMACHANDRAN MURALIDHAR;MILLER JAMES W.
分类号 H01L21/336;H01L21/265;H01L21/8234;H01L29/78 主分类号 H01L21/336
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